Vision300 12 inch ingot silicon crystal growing furnace
Vision300 12 inch ingot silicon crystal growing furnace
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The Kayex Vision 300 Silicon Crystal Growing furnace is capable
of growing silicon ingots up to 12 inches in diameter.
Performance
| Typical Ingot Diameter |
12" (300 mm) |
| Pull Chamber Door Opening (W x H) |
19" x 87" (483 x 2210
mm) |
| Throat Diameter |
20" (508 mm) |
| Seed Lift Rate |
0-20 in/hr (0-508 mm/hr) |
| Furnace Chamber ID (Inside Diameter) |
55" (1397 mm) |
| Seed Jog Speed (Nominal) |
18.6 in/min (472 mm/min) |
| Total Crucible Travel |
32" (813 mm) |
| Crucible Lift Rate |
0-10 in/hr (0-254 mm/hr) |
| Crucible Jog Speed (Nominal) |
4.7 in/min (119 mm/min) |
| Seed Rotation (Reversible) |
0-30 rpm |
| Crucible Rotation (Reversible) |
0-20 rpm |
Vacuum Pumps
(Recommended) |
Main
Aux |
|
600 cfm (16990
l/min)
125 cfm (3540 l/min) |
Silicon Charge Capacity
Standard Hot Zones for the FX150 are
available to fit the following crucible size:
| Crucible Diameter |
Crucible Height |
Charge Size
Cold Pack |
| 18 inches |
13.5
inches |
60 kg |
| 22 inches |
15.12 inches |
100 kg |
| 24 inches |
14.96
inches |
150 kg |
|
|
|
Utility Requirements
Electrical
Electrical
Furnace:
Rate excludes
optional equipment such as vacuum pumps and a magnet power supply. |
350kVA, 380 / 400 / 440 / 460 ±10% VAC.
3 PHASE 50/60 Hz, FUSED FOR
650 / 625 / 575 / 550 amps |
Magnet - Cusp Field, Conventional
* Optional 2000 Gauss Superconducting Magnet available |
665 kVA, 460 +10% VAC.
3 PHASE 60 Hz, FUSED FOR
1000 amps |
| Coolant
Water |
| Maximum
Inlet Temperature |
86ºF
(30ºC) |
| Minimum
Flow Rate |
240 gpm (909 l/min)
total |
| Diff. Supply Pressure |
40 psi (2.8 kg/cm2) |
| Argon |
| Mass
Flow Control (Max.) |
200 slpm |
| Recommended
Supply Pressure |
75 psi (5.3 kg/cm2) |
| Purge Flow |
200 slpm |
| Facility Total |
400 slpm |
| Air |
| Recommended
Supply Pressure |
90 psi (6.3 kg/cm2) |
Dimensions
|
Furnace
Section (Closed with Magnet) |
Control
Enclosure |
Power
Supply
(Heater) |
Power
Supply
(Magnet) |
Height |
363 in
(9.23 m) |
79 in
(2.01 m) |
79 in
(2.01 m) |
95 in
(2.41 m) |
Width |
140 in
(3.54 m) |
72 in
(1.83 m) |
102 in
(2.59 m) |
72 in
(1.83 m) |
Depth |
232 in
(5.90 m) |
24 in
(0.61 m) |
72 in
(1.83 m) |
46 in
(1.17 m) |
Weight
(approx.) |
69,150
lbs
(31,366 kg) |
1,200
lbs
(545 kg) |
10,000
lbs
(4,545 kg) |
4,930
lbs
(2,237 kg) |
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